| 摘要 |
<P>PROBLEM TO BE SOLVED: To apply an air blowing mechanism for supplying air to a gap between a peripheral wall of a rotating tank and an outer circumferential edge of a disk, in a coating tank in which the rotating tank and the disk can rotate independently. <P>SOLUTION: The air blowing mechanism 13 having a connection part (connection member 75) for connection with an air supply source 76, includes: a support member 71 for rotatably supporting a coating tank 22; a flow-in space 74 provided between the support member 71 and the coating tank 22, and communicating with the connection member 75; and a ventilation passage 77 provided in the coating tank 22, and communicating the flow-in space 74 to a ventilation space 72. <P>COPYRIGHT: (C)2012,JPO&INPIT |
