| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem in which, in a nanoimprint method using an ultraviolet-curable resin, when copying a plurality of rugged patterns from one master disk, if the ultraviolet-curable resin is adhered to the master disk, it is hard to remove it. <P>SOLUTION: In a nanoimprint method, an ultraviolet-curable resin is applied onto a substrate with a thickness equal to or less than 300 nm, for performing sticking to a master disk, and peeling from the master disk is performed without ultraviolet irradiation. After that, the ultraviolet-curable resin is solidified with ultraviolet irradiation for copying a pattern. <P>COPYRIGHT: (C)2012,JPO&INPIT |
