| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method which efficiently and stably forms a pattern on a thin film substrate. <P>SOLUTION: In a manufacturing method of a thin film substrate, a thin film substrate, a glutinous adhesive for tentative fixture, and a hard substrate are laminated in this order. The thin film substrate is fixed to the hard substrate through the glutinous adhesive. Then, a pattern is formed. Subsequently, the thin film substrate is peeled from a boundary surface with the glutinous adhesive. <P>COPYRIGHT: (C)2012,JPO&INPIT |
