发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which allows pillars to be disposed securely, and to provide a manufacturing method of the semiconductor device. <P>SOLUTION: A semiconductor device 30 according to one embodiment of this invention includes: a semiconductor chip 1 including an inner circuit region 20 and an I/O region 10 provided at the outer side of the inner circuit region 20; a package substrate 6 connecting with the semiconductor chip 1 through a flip-flop method; and conductive pillars 4, each of which is disposed between the semiconductor chip 1 and the package substrate 6, is formed on two or more ground wirings 12a included in an uppermost layer wiring layer 12 of the semiconductor chip 1, connects the two or more ground wirings 12a with each other. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012186374(A) 申请公布日期 2012.09.27
申请号 JP20110049262 申请日期 2011.03.07
申请人 RENESAS ELECTRONICS CORP 发明人 AKIYAMA NAOTO;NAKAYAMA TAKASHI;KISHIBE KOJI;HIRAGA TAKEFUMI
分类号 H01L21/60;H01L21/3205;H01L21/768;H01L21/822;H01L23/12;H01L23/522;H01L27/04 主分类号 H01L21/60
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