发明名称 |
TEMPERATURE MEASURING APPARATUS AND TEMPERATURE MEASURING METHOD |
摘要 |
A temperature measuring apparatus and a temperature measuring method that may simultaneously measure temperatures of objects in processing chambers. The temperature measuring apparatus includes a first light separating unit which divides light from the light source into measurement lights; second light separating units which divide the measurement lights from the first light separating unit into measurement lights and reference lights; third light separating units which further divide the measurement lights into first to n-th measurement lights; a reference light reflecting unit which reflects the reference lights; an light path length changing unit which changes light path lengths of the reference lights reflected by the reference light reflecting unit; and photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit.
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申请公布号 |
US2012243572(A1) |
申请公布日期 |
2012.09.27 |
申请号 |
US201213428198 |
申请日期 |
2012.03.23 |
申请人 |
MATSUDO TATSUO;KOSHIMIZU CHISHIO;TOKYO ELECTRON LIMITED |
发明人 |
MATSUDO TATSUO;KOSHIMIZU CHISHIO |
分类号 |
G01K11/32 |
主分类号 |
G01K11/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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