METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM AND METHOD FOR MANUFACTURING SOLAR CELL

摘要

The purpose of the present invention is to provide a transparent conductive film having less grain boundaries by favorably modifying the transparent conductive film. In a method for producing a transparent conductive film of the present invention, after a transparent conductive film (3) is formed on a substrate (2) within a vacuum container (10), the transparent conductive film (3) is modified by applying radiation heat to the transparent conductive film (3) from a surface modification device (4) that is arranged close to the substrate (2), and then the substrate (2) that has the modified transparent conductive film (3) is taken out of the vacuum container (10).