发明名称 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A method for manufacturing a semiconductor memory device includes forming a magnetic tunnel junction layer on a lower electrode, forming a spacer having an annular shape on the magnetic tunnel junction layer, forming upper electrodes on both sidewall surfaces of the annular shaped spacer, removing the spacer, and etching the magnetic tunnel junction layer by using the upper electrodes as an etch mask.
申请公布号 US2012241828(A1) 申请公布日期 2012.09.27
申请号 US201113336069 申请日期 2011.12.23
申请人 LEE SEUNG HYUN 发明人 LEE SEUNG HYUN
分类号 H01L29/82;H01L21/8246 主分类号 H01L29/82
代理机构 代理人
主权项
地址