METHOD AND APPARATUS FOR MEASURING 3D HEIGHT INFORMATION OF MEASURED OBJECT

摘要

PURPOSE: A method and a device for measuring 3D height information of a measurement object are provided to measure 3D height information of a measurement object from one photographing data. CONSTITUTION: A method for measuring 3D height information of a measurement object is as follows. Lights penetrated through a lattice are irradiated on a measurement object(S40). The lights reflected by a surface of the measurement object are photographed(S41). The photographing data of one photograph is signal-processed by a signal processing method of a digital holographic microscope technique so that a phase change amount according to the measurement object is calculated(S46). The height information of the measurement object based on the phase change amount(S47). [Reference numerals] (AA) Start; (BB) Finish; (S400) Irradiating lights penetrated through a lattice on a measurement object; (S41) Photographing; (S42) Converting a frequency region; (S43) Eliminating background light components/conjugation components; (S44) Extracting phase change amount components; (S45) Extracting phase change data; (S46) Calculating phase change amount; (S47) Calculating height information