| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for machining a body to be divided, by which the formation of machined marks is suppressed and also the formation of the starting point of division, by which the division of a workpiece is more securely achieved, is made possible. <P>SOLUTION: The method for machining for forming the starting point of division on the workpiece includes: a placing step in which the workpiece is placed on a stage; a liquid layer forming step in which a liquid layer is formed by liquid, which is permeable to a pulse laser beam used for machining the workpiece, on the surface to be machined of the workpiece placed on the stage; and an irradiating step in which the starting point for division is formed on the workpiece by generating the cleavage or the dehiscence of the workpiece successively between the mutual irradiated regions by irradiating the workpiece with the pulse laser beam so that the irradiated regions for every individual unit pulse beam are formed discretely on the surface to be machined while making the pulse laser beam permeate a liquid layer, while moving the stage and the light source continuously and relatively. <P>COPYRIGHT: (C)2012,JPO&INPIT |
