| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique advantageous for positioning a reticle in a container while suppressing the generation of particles. <P>SOLUTION: A container includes an inner case housing a reticle and an outer case. The inner case includes a base plate, an inner cover and a first positioning member for positioning the reticle by coming into contact with a chamfer of the reticle. In the first positioning member, the contact surface with the chamfer is inclined at the elevation angle of the same direction with respect to the top face of the base plate, and the first positioning member includes a first inclined plane 122 which comes into contact with the chamfer first after the first positioning member is pushed by a pushing part, and a second inclined plane 121 which is formed above the first inclined plane 122 and which comes into contact with the chamfer later than the first inclined plane 122, and the angle formed outside the first positioning member by the first inclined plane 122 and the second inclined plane 121 is less than 180°. <P>COPYRIGHT: (C)2012,JPO&INPIT |
