| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable formation of the aggregate of a silane coupling agent to be reduced in nanoimprinting that includes a step of performing surface treatment by coating the surface of a substrate with the silane coupling agent. <P>SOLUTION: In a nanoimprinting method, the surface of a substrate 2 is coated with a silane coupling agent 3 having alkyl groups of 1 or 2 adjacent to an Si atom. the surface coated with the silane coupling agent 3 is coated with a curable resin containing any of isobornyl acrylate, ethylene glycol diacrylate, and a silicone monomer compound to form a curable resin film 4. A mold 1 is pressed against the curable resin film 4 with its rugged pattern facing the curable resin film 4 to turn the curable resin film 4 cured. The mold 1 is then separated from the curable resin film 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
