PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

摘要

A pattern forming apparatus includes a first nozzle part 52 in which discharge nozzles 523 for discharging an application liquid are arranged in a row in a direction (Y-direction) perpendicular to a scan-moving direction relative to a substrate, and a second nozzle part 72 including a pair of discharge nozzles 723, the positions of which in the Y-direction can be changed by a ball screw mechanism 740. A plurality of pattern elements parallel to each other and having the same length are formed by the discharge of the application liquid from the first nozzle part 52 and, on the other hand, pattern elements having lengths different from these pattern elements are formed by the second nozzle part 72, the application of which is controlled at timings independent of the first nozzle part 52.