Gas providing member and processing device,申请号EP20060251374-传众专利搜索

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发明名称	Gas providing member and processing device
摘要
申请公布号	EP1703545(B1)	申请公布日期	2012.09.26
申请号	EP20060251374	申请日期	2006.03.15
申请人	NGK INSULATORS, LTD.	发明人	TOMITA, YASUMITSU;UNNO, YUTAKA
分类号	H01L21/67;H01L21/687	主分类号	H01L21/67
代理机构		代理人
主权项
地址

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