发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to quicken an elimination operation by rapidly boosting channel dislocation of a memory cell using GIDL(Gate Induced Drain Leakage) current. CONSTITUTION: A semiconductor device comprises a substrate, a first lamination body, a first channel body(20), a second lamination body, a gate insulating layer, and a second channel body(51). A stepped pulley part is formed between the side of a selection gate and a second insulating layer. The thickness of the second channel body of a portion coating the stepped pulley part is thicker than the thickness of the second channel body of a portion formed on the second insulating layer. The second channel body is installed inside the gate insulating layer and is connected to the first channel body.</p>
申请公布号 KR20120106525(A) 申请公布日期 2012.09.26
申请号 KR20110086493 申请日期 2011.08.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ISHIDUKI MEGUMI;KATSUMATA RYOTA;OHSAWA TOMO;SATO MITSURU;KIDOH MASARU;TANAKA HIROYASU
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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