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发明名称	METHOD FOR FORMING THIN FILM
摘要
申请公布号	EP2039801(B1)	申请公布日期	2012.09.26
申请号	EP20070745295	申请日期	2007.06.14
申请人	ASAHI GLASS COMPANY, LIMITED	发明人	AOMINE, NOBUTAKA;AOSHIMA, YUKI;HAYASHI, KAZUSHI;KUGIMIYA, TOSHIHIRO;KOBORI, TAKASHI
分类号	H01J37/32	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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