SUBSTRATE SUPPORTING DEVICE

摘要

PURPOSE: A substrate holding device is provided to stably hold a substrate by elastically deforming an O ring interposed between an outer groove formed in a pad body and an inner groove formed in a pad holding member. CONSTITUTION: A transfer arm body(30) has a suction path. A pad body(40) includes an absorbing unit with an absorbing surface and a suction hole, and a cylindrical mounting unit. A pad holding member includes an insertion hole and a connection path and is fixed to the transfer arm body. An O ring is elastically deformed and is interposed between an arced outer groove(46) formed in the mounting unit and an arced inner groove(55) formed in the insertion hole of the pad holding member.