SUBSTRATE SUPPORT DEVICE OF SYSTEM FOR MANUFACTURING OLED

摘要

PURPOSE: A substrate support device of an apparatus for manufacturing an OLED(Organic Light Emitting Diode) is provided to stably deposit a substrate by attaching the substrate on the upper side and the lower side of a chucking plate to form a pair of subsidiary attaching devices. CONSTITUTION: A chucking plate(10) attaches a substrate(S) by a subsidiary attaching device(40,50) using a magnetic force. The subsidiary attaching devices are formed on an edge of the chucking plate. The subsidiary attaching devices are respectively formed on the upper side and the lower side of the chucking plate. An adhesive chuck(110) is a ring structure.