RECORDING MEDIUM STORING ORIGINAL DATA GENERATION PROGRAM, ORIGINAL DATA GENERATION METHOD, ORIGINAL FABRICATING METHOD, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

To calculate data of an original, a computer is caused to execute the following steps of converting data regarding an intended pattern to be formed on a substrate into frequency-domain data (S2), calculating a two-dimensional transmission cross coefficient using a function representing an effective light source that an illumination device forms on a pupil plane of a projection optical system when the original is absent on an object plane of the projection optical system and using a pupil function of the projection optical system (S3), calculating a diffracted light distribution from a pattern that is formed on the object plane using both the frequency-domain data and data of at least one component of the calculated two-dimensional transmission cross coefficient (S4), and converting data of the calculated diffracted light distribution into spatial-domain data to determine the data of the original (S5).