DEVICE FOR CHUCK OF SUBSTRATE

摘要

PURPOSE: A substrate chucking device is provided to uniformly inhale for a short time by using a plurality of suction pipes and a suction hole of a chucking plate. CONSTITUTION: A chucking plate(100) includes a plurality of suction holes(102). A plurality of suction pipes(110) is connected to suction holes of the chucking plate. A suction tank(120) is connected between suction pipes and a first switching valve. A pump(140) is connected to a connection pipe(130) connecting the suction tank and a second switching valve(132). The suction tank is vacuum tank maintaining the vacuum state by the pump.