发明名称 ROTARY JOINT AND LED DEVICE INSPECTION APPARATUS HAVING THE SAME
摘要 PURPOSE: A rotary joint and an LED device inspecting apparatus including the same are provided to simply transmits pneumatic pressure to a rotary pneumatic module by rotating a fixed pneumatic module interlocked with the rotary pneumatic module. CONSTITUTION: A fixed shaft(610) is fixed to a structure. A fixed pneumatic transmitting block(630) is fixed to the fixed shaft. A plurality of pneumatic input ports(631) are installed around the fixed shaft in a circumferential direction. A rotary pneumatic transmitting block(640) is rotatably combined with the fixed shaft and is contacted with the fixed pneumatic transmitting block. A plurality of pneumatic output ports(641) are installed in the rotary pneumatic transmitting block.
申请公布号 KR20120106495(A) 申请公布日期 2012.09.26
申请号 KR20110024641 申请日期 2011.03.18
申请人 JT CORPORATION 发明人 YOU, HONG JUN
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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