METHOD FOR FORMING METAL OXIDE FILM

摘要

PURPOSE: A method for forming a metal oxide film is provided to control electrical conductivity of the metal oxide film by controlling doping conditions of an ion injection process. CONSTITUTION: A coating solution including a metal precursor is prepared(S110). The metal precursor is an organic metal compound. A coating layer is formed on a substrate by supplying the coating solution on the substrate(S120). The coating layer is formed by ink-jet printing, spin coating and screen printing. A first metal oxide film is formed by drying the coating layer(S130). The electrical conductivity of the first metal oxide film is controlled by doping impurity on the first metal oxide film. [Reference numerals] (AA) Start; (BB) End; (S110) Preparing a coating solution including a metal precursor; (S120) Forming a coating layer; (S130) Forming a first metal oxide film; (S140) Doping impurities(electric conductivity control)