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发明名称
ELECTRICAL SYSTEM, ESPECIALLY A MICROELECTRONIC OR MICROELECTROMECHANICAL HIGH FREQUENCY SYSTEM
摘要
申请公布号
EP1520320(B1)
申请公布日期
2012.09.26
申请号
EP20030740103
申请日期
2003.06.24
申请人
ROBERT BOSCH GMBH
发明人
BREITSCHWERDT, KLAUS;ULM, MARKUS;URBAN, ANDREA;REIMANN, MATHIAS
分类号
H01L23/66;H01P1/04;H01P11/00
主分类号
H01L23/66
代理机构
代理人
主权项
地址
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