| 发明名称 |
HIGH TEMPERATURE CHUCK AND METHOD OF USING SAME |
| 摘要 |
Improved resistance to temperature-related degradation or deformation in a wafer-supporting chuck is provided by at least one shielding member that physically and/or thermally shields chuck components from effects of elevated temperature processing fluids. |
| 申请公布号 |
KR20120105475(A) |
申请公布日期 |
2012.09.25 |
| 申请号 |
KR20127015640 |
申请日期 |
2010.12.02 |
| 申请人 |
LAM RESEARCH AG |
发明人 |
BRUGGER MICHAEL;LACH OTTO |
| 分类号 |
H01L21/687;H01L21/683 |
主分类号 |
H01L21/687 |
| 代理机构 |
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代理人 |
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| 主权项 |
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