SLIT ELECTRODE AND CHARGED PARTICLE BEAM GENERATING APPARATUS HAVING THE SAME

摘要

PURPOSE: A slit electrode and a charged particle generator including the same are provided to prevent the change of an opening of a slit shape by permitting expansion and contraction of an electrode rod due to heat and controlling deformation. CONSTITUTION: An electrode frame(21) comprises an opening. A plurality of electrode rods is movably supported to the electrode frame. The plurality of electrode rods is placed on the opening side by side. A refrigerant inlet port(RIN) draws in refrigerant in a part of an external circumference domain of the opening. A refrigerant outlet port(ROUT) draws out the refrigerant from the electrode frame. The refrigerant inlet port and the refrigerant outlet port are formed on a refrigerant path.