EVAPORATING APPARATUS HAVING LIGHT EMITTING MEMBER WITH IMPURITY REMOVING FUNCTION

摘要

PURPOSE: A deposition apparatus with a light irradiating unit for removing impurities is provided to maintain uniform intensity and wavelength of ultraviolet rays irradiating a substrate by removing a source accumulated on a light transmission unit. CONSTITUTION: A deposition apparatus comprises a chamber unit(110), a light irradiating unit(120), and a light transmission unit(130). The chamber unit accommodates a substrate to deposit a source. The light irradiating unit irradiates the substrate with ultraviolet ray. The light transmission unit is made of a light transmissive material and arranged between the light irradiating unit and the substrate. The light transmission unit comprises a window for letting the ultraviolet ray generated from the light irradiating unit into the chamber unit, a heating member which generates heat inside the chamber unit to remove foreign materials blocking the transmission of the ultraviolet ray through the window, and a protective layer covering the heating member.