发明名称 Nonvolatile semiconductor memory device and method for manufacturing the same
摘要 A nonvolatile semiconductor memory device, includes: a stacked body including a plurality of insulating films alternately stacked with a plurality of electrode films, the electrode films being divided to form a plurality of control gate electrodes aligned in a first direction; a plurality of semiconductor pillars aligned in a stacking direction of the stacked body, the semiconductor pillars being arranged in a matrix configuration along the first direction and a second direction intersecting the first direction to pierce the control gate electrodes; and a connection member connecting a lower end portion of one of the semiconductor pillars to a lower end portion of one other of the semiconductor pillars, an upper end portion of the one of the semiconductor pillars being connected to a source line, an upper end portion of the one other of the semiconductor pillars being connected to a bit line. At least some of the control gate electrodes are pierced by two of the semiconductor pillars adjacent to each other in the second direction. Two of the semiconductor pillars being connected to each other by the connection member pierce mutually different control gate electrodes.
申请公布号 US8274108(B2) 申请公布日期 2012.09.25
申请号 US20100705231 申请日期 2010.02.12
申请人 KATSUMATA RYOTA;KITO MASARU;KIDOH MASARU;TANAKA HIROYASU;ISHIDUKI MEGUMI;KOMORI YOSUKE;FUKUZUMI YOSHIAKI;AOCHI HIDEAKI;KABUSHIKI KAISHA TOSHIBA 发明人 KATSUMATA RYOTA;KITO MASARU;KIDOH MASARU;TANAKA HIROYASU;ISHIDUKI MEGUMI;KOMORI YOSUKE;FUKUZUMI YOSHIAKI;AOCHI HIDEAKI
分类号 H01L29/788;H01L21/336 主分类号 H01L29/788
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