发明名称 |
Flat panel display manufacturing apparatus |
摘要 |
Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span. |
申请公布号 |
US8273211(B2) |
申请公布日期 |
2012.09.25 |
申请号 |
US20080246563 |
申请日期 |
2008.10.07 |
申请人 |
HUR GWANG HO;CHOI JUN YOUNG;LEE CHEOL WON;AHN HYUN HWAN;HWANG YOUNG JOO;KIM CHUN SIK;ADVANCED DISPLAY PROCESS ENGINEERING CO., LTD. |
发明人 |
HUR GWANG HO;CHOI JUN YOUNG;LEE CHEOL WON;AHN HYUN HWAN;HWANG YOUNG JOO;KIM CHUN SIK |
分类号 |
H01L21/3065;B05B1/00;C23C16/00;C23F4/00;H01J9/00;H01J37/32;H01L21/00;H05H1/00 |
主分类号 |
H01L21/3065 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|