| 摘要 |
PURPOSE: A laser lift-off apparatus is provided to effectively collect dust particles spouting from the edge part of a work in a parallel direction with the plane of the work by installing a dust collection machine in order to surround an edge portion of the work. CONSTITUTION: A laser source(30) generates pulse laser light. A laser optic device(40) molds the pulse laser light as predetermined shape. The laser optic device comprises a mirror(43), a mask(44), and a projection lens(45). The mirror reflects the pulse laser light in a work direction. The projection lens projects a phase of the pulse laser light passing through the mask. A returning device(2) returns a work stage(10). A controller(31) controls radiation interval of the pulse laser light and operation of the returning device. [Reference numerals] (1) Work; (10) Work stage; (12) Cylindrical lens; (2) Returning device; (23) Hollow container for dust removal; (30) Laser source; (31) Controller; (3A) Light incidence plane; (40) Laser optic device; (41) Cylindrical lens; (43) Mirror; (44) Mask; (45) Projection lens; (AA) Laser lift off device; (BB) Laser light L
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