发明名称 OPTICAL PROBE INCLUDING A GRATING TYPE NANO PATTERN AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: An optical probe with grating type nano patterns and a manufacturing method thereof are provided to periodically form grating type nano patterns around the optical probe, thereby increasing light transmittance. CONSTITUTION: Grating type nano patterns are periodically formed on a light emitting surface along with an external inclined surface of a probe around a vertex of a probe of a protruding optical sensor. A metallic film is deposited on the probe. The probe of the protruding optical sensor has a pyramid structure or a cone structure. The top of the grating type nano patterns has a square shape, a circular shape, or an elliptical shape.
申请公布号 KR101185105(B1) 申请公布日期 2012.09.21
申请号 KR20110025507 申请日期 2011.03.22
申请人 SNU R&DB FOUNDATION 发明人 CHOI, SUNG SOO;PARK, NAM KYOO
分类号 G01Q70/16;B82B3/00 主分类号 G01Q70/16
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