| 摘要 |
<p>A laser machining method includes directing pulse laser light onto a surface of a brittle material substrate, and a laser light scanning step for scanning laser light along a scribe-scheduled line. The laser intensity of the pulse laser light is 1.0 × 10 8 W/cm 2 or greater and 1.0 × 10 10 W/cm 2 or less. The value obtained by multiplying the amount of heat input (J/cm 2 ) by the linear expansion coefficient (10 -7 /K) of the brittle material is in a range of 3000 or greater and 100000 or less. Furthermore, the number of pulses within a square circumscribing the condensed light diameter of the pulse laser light is two or greater.</p> |
