| 摘要 |
PURPOSE: A nonstop device for supplying and controlling gas and a controlling method thereof are provided to improve a manufacturing yield by preventing gas supply from being interrupted to semiconductor manufacturing facilities due to power off. CONSTITUTION: A valve box(24) includes an air valve which supplies process gas to semiconductor manufacturing facilities. A VMB(Valve Manifold Box) control unit(22) controls a valve box to open and close air valves. A plurality of sensors(28) senses temperature, gas leakage, and light. A power source sensing circuit(27) senses a power supply state. An interface unit(130) is electrically connected to the plurality of sensors. [Reference numerals] (100) Gas supply control device; (110) Controller; (120) Power switching unit; (130) Interface unit; (150) Second power supply unit; (150) Operation unit; (170) Selection unit; (180) Valve drive unit; (190) Display drive unit; (20) Valve manifold box; (200) Solenoid valve; (210) Display unit; (22) VMB control unit; (24) Valve box; (26) First power supply unit; (27) Power sensing circuit; (28) Sensor; (AA) Process gas
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