APPARATUS FOR WASHING OBJECT TO BE WASHED

摘要

[Problem] Since a working chamber for performing an operation of washing an object to be washed is provided so as to move vertically in a washing tank and be separated from the washing tank and airtightly isolated, minimum space required for an operation of washing the object to be washed such as drying under reduced pressure can be provided, and drying under reduced pressure can be efficiently performed in the presence of washing solution or washing steam in the washing tank without unnecessary burden on a reduced pressure system. [Solution] A pressure-resistant working chamber (2) which can move vertically in a washing tank (1), has an opening part (22) capable of opening and closing on the side face in a direction of vertical movement, and receives an object (12) to be washed is provided. A covering part (24) in which the working chamber (2) can be closed by covering the opening part (22) provided on the side of the working chamber (2) and can be depressurized by being connected to a reduced pressure system (27) is provided in the inner face of the washing tank (1) so as to move horizontally.