| 摘要 |
<p>The present invention discloses a vapor deposition shadow mask system for backplane and display screen of any size and a method thereof. The system includes at least one vacuum chamber (13A, 13B, 13C and 13D), a substrate (10) and a transmission device. The vacuum chambers (13A, 13B, 13C and 13D) accommodate 'M' set of shadow mask plates (11a, 11b, 11c and 11d) and deposition sources therein. The substrate (10) includes 'M' number of elementary units, each of which being partitioned into 'N' number of regions. The transmission device is utilized to shift the substrate (10) or the shadow mask plate along a path of the vacuum chamber such that the 'M' set of shadow mask plates are corresponded to the different regions of the 'M' number of elementary units in 'N' number of periods. The 'M' is a natural number greater than or equal to one, and the 'N' is a natural number greater than or equal to two.</p> |
