| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production method capable of easily giving a silicon nitride-based ceramic with high thermal conductivity. <P>SOLUTION: The production method includes: a mixing step of mixing a raw material powder which is a silicon nitride powder and a sintering aid; a compacting step of compacting a mixed powder obtained by the mixing step to form a green compact; and a sintering step of sintering the green compact in a nitrogen atmosphere to form a sintered compact of a silicon nitride-based ceramic, wherein in the mixing step, (a) wt.% of Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, (b) wt.% of HfO<SB POS="POST">2</SB>and (c) wt.% (c is 0-1) of SiO<SB POS="POST">2</SB>are added as the sintering aid, with respect to the total weight of the raw material powder and the sintering aid, MgO is not added, and the sintering aid is added so as to satisfy b/a=1-2 and a+b+c=5.5-11 wt.%. <P>COPYRIGHT: (C)2012,JPO&INPIT |
