| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation inspection device capable of accurately performing calibration even when an inspection object etc. is arranged between a radiation source and a linear detector. <P>SOLUTION: A thickness inspection device as a radiation inspection device includes: a radiation source 11 arranged on one side of a sheet ST as an inspection object and irradiating the sheet ST with a linear radiation to be extended in an inspection direction (an X direction) set on the sheet ST; a linear detector 12 arranged on the other side of the sheet ST and detecting the linear radiation that has transmitted through the sheet ST; calibration detectors 13 and 14 arranged at least between the radiation source 11 and the sheet ST or between the sheet ST and the linear detector 12 and detecting the radiation from the radiation source 11, while moving in an inspection direction; and a calibration device for calibrating the detection result of the linear detector 12 through the use of the detection results of the calibration detectors 13 and 14. <P>COPYRIGHT: (C)2012,JPO&INPIT |
