| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new method for observing a cam surface, which uses a wide-field laser microscope and by which the cam surface can be observed. <P>SOLUTION: A new method for observing a cam surface includes: converting reflected light from a cam surface 10 arranged close to the vicinity of the focal plane of a telecentric fθ lens 8 into a parallel luminous flux by the telecentric fθ lens 8; after reflecting the flux by a scan mirror 7, focusing the flux by an imaging lens 11 and making the flux pass through a pin hole 12a disposed at a position conjugate with the telecentric fθ lens 8; and measuring the amount of the reflected light passing through the pin hole 12a by a light receiving element 13. The observation is performed while rotating a cam shaft 9 having the cam surface 10 around its shaft z to make the cam surface 10 always perpendicular to laser light and moving the cam shaft 9 so that the focus of the laser light is located always on the cam surface 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
