发明名称 Method to Improve Nucleation of Materials on Graphene and Carbon Nanotubes
摘要 Techniques for forming a thin coating of a material on a carbon-based material are provided. In one aspect, a method for forming a thin coating on a surface of a carbon-based material is provided. The method includes the following steps. An ultra thin silicon nucleation layer is deposited to a thickness of from about two angstroms to about 10 angstroms on at least a portion of the surface of the carbon-based material to facilitate nucleation of the coating on the surface of the carbon-based material. The thin coating is deposited to a thickness of from about two angstroms to about 100 angstroms over the ultra thin silicon layer to form the thin coating on the surface of the carbon-based material.
申请公布号 US2012235119(A1) 申请公布日期 2012.09.20
申请号 US201213482262 申请日期 2012.05.29
申请人 BABICH KATHERINA;CALLEGARI ALESSANDRO;CHEN ZHIHONG;KIEWRA EDWARD;SUN YANNING;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BABICH KATHERINA;CALLEGARI ALESSANDRO;CHEN ZHIHONG;KIEWRA EDWARD;SUN YANNING
分类号 H01L29/775;H01L29/04 主分类号 H01L29/775
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