发明名称 |
Method to Improve Nucleation of Materials on Graphene and Carbon Nanotubes |
摘要 |
Techniques for forming a thin coating of a material on a carbon-based material are provided. In one aspect, a method for forming a thin coating on a surface of a carbon-based material is provided. The method includes the following steps. An ultra thin silicon nucleation layer is deposited to a thickness of from about two angstroms to about 10 angstroms on at least a portion of the surface of the carbon-based material to facilitate nucleation of the coating on the surface of the carbon-based material. The thin coating is deposited to a thickness of from about two angstroms to about 100 angstroms over the ultra thin silicon layer to form the thin coating on the surface of the carbon-based material.
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申请公布号 |
US2012235119(A1) |
申请公布日期 |
2012.09.20 |
申请号 |
US201213482262 |
申请日期 |
2012.05.29 |
申请人 |
BABICH KATHERINA;CALLEGARI ALESSANDRO;CHEN ZHIHONG;KIEWRA EDWARD;SUN YANNING;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BABICH KATHERINA;CALLEGARI ALESSANDRO;CHEN ZHIHONG;KIEWRA EDWARD;SUN YANNING |
分类号 |
H01L29/775;H01L29/04 |
主分类号 |
H01L29/775 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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