| 摘要 |
<p>An MEMS microphone and a forming method therefor. The MEMS microphone comprises: a substrate, the substrate is provided with a first surface and a second surface opposite to the first surface, an opening running through the substrate, a plurality of connection electrodes formed on the first surface of the substrate, a dielectric layer arranged on the first surface of the substrate and covering the plurality of connection electrodes, a conductive plug arranged within the dielectric layer, a cavity arranged within the dielectric layer and in communication with the opening, a sensitive diaphragm arranged within the cavity, at least one sensitive diaphragm support arranged on a surface of the sensitive diaphragm, a sensitive diaphragm support arm partially arranged on a surface of the dielectric layer and connected to the sensitive diaphragm support, a fixed electrode corresponding to the sensitive diaphragm, a via formed within the fixed electrode and running through the fixed electrode, and a top-layer electrode electrically connected to the conductive plug. The present invention allows for reduced stress for the MEMS microphone, and for prevention of damages to the sensitive diaphragm and to the fixed electrode.</p> |
