METHOD AND SYSTEM FOR REMOVING METAL CONTAMINANTS ADHERED TO QUARTZ MEMBER OF VERTICAL HEAT PROCESSING APPARATUS,申请号KR20090046779-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR REMOVING METAL CONTAMINANTS ADHERED TO QUARTZ MEMBER OF VERTICAL HEAT PROCESSING APPARATUS
摘要
申请公布号	KR101184880(B1)	申请公布日期	2012.09.20
申请号	KR20090046779	申请日期	2009.05.28
申请人		发明人
分类号	H01L21/302;H01L21/324	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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