| 摘要 |
PURPOSE: A lift bar for lifting a glass substrate for flat panel display in an exposure apparatus is provided to stably secure a conductive path by positioning an electrostatic drawing pin between a glass loading part and a lift body. CONSTITUTION: A lift bar includes a rod-shaped lift body(10), a glass loading part(20), a swing arm(30), and a static electricity removing part(40). The upper part of the lift body is flat. The external surface of the lift body is coated with a non-conductive material, and the inner part of the lift body is made of a metal. The glass loading part is a conductive material-based thin film tape. The glass loading part is extended to be attached to the upper part of the lift body. The static electricity removing part is conductive metal-based block shaped member and electrically conducts the glass loading part and the inner part of the lift body. |
