| 摘要 |
FIELD: metallurgy. ^ SUBSTANCE: vacuum-plasma deposition of multilayer coating is carried out. Lower layer from nitride or carnonitride of titanium, silicon and zirconium is deposited at the ratio in wt %: titanium - 83.3-87.94, silicon - 0.26-0.50, zirconium - 11.8-16.2, while intermediate layer of said components is deposited at the ratio of, in wt %: titanium - 82.92-87.58, silicon - 0.62-0.88, aluminium - 11.8-16.2, and top layer is deposited at the ratio of, in wt %: titanium 99.31-99.56, silicon 0.44-0.69. Coat layers are applied horizontally in one plane by three cathodes, first and second being made composed of titanium and silicon and arranged in opposition. Third composite cathode is made of titanium and zirconium and arranged there between. Bottom layer is applied using first and third cathodes, intermediate layer is produced by second and third cathodes while top layer is made by first and second cathodes. ^ EFFECT: higher wear resistance. ^ 1 tbl |
