发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to prevent the damage of an active area by forming a gate pattern on an upper part of an exposed active guard in an outside area between a cell area and a surrounding circuit area. CONSTITUTION: An active area(210) and a device separation area(220) are etched to form a recess. A conductive substance and a first insulation film are formed on the recess. The first insulation film is etched to form steps in a cell area and a surrounding circuit area. A second insulation film is formed on a font side including the first insulation film. The second insulation film is etched to form a spacer on the active area between the cell area and the surrounding circuit area. A bit line pattern(290) connected to a contact plug is formed on the cell area. A gate pattern is formed on an active guard of the surrounding circuit area.
申请公布号 KR20120103981(A) 申请公布日期 2012.09.20
申请号 KR20110022001 申请日期 2011.03.11
申请人 SK HYNIX INC. 发明人 HAN, DONG HEE
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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