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发明名称
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND STORAGE MEDIUM
摘要
申请公布号
KR101184850(B1)
申请公布日期
2012.09.20
申请号
KR20070081496
申请日期
2007.08.14
申请人
发明人
分类号
H01L21/324;C23C16/46;C23C16/52;H01L21/22;H01L21/31
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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