| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an ultrasonic probe in which deterioration of piezoelectric effect due to cutting of a piezoelectric subjected to polarization treatment can be minimized. <P>SOLUTION: In the first step, an acoustic matching layer 40 and a backing layer 10 are laminated on a composite piezoelectric having a plurality of columnar piezoelectric elements 31 arranged in at least one-dimensional array at predetermined intervals, and a polymer layer 32 composed of a polymer material located between the piezoelectric elements 31, and provided with an electrode 21 and a common electrode 22 on a surface transmitting/receiving ultrasonic waves and a surface facing that surface. In the second step, the composite piezoelectric is cut together with the acoustic matching layer 40 along the polymer layer 32 from the side opposite from the side provided with the backing layer 10, thus forming a plurality of ultrasonic vibrators 33 in array. <P>COPYRIGHT: (C)2012,JPO&INPIT |
