发明名称 |
ERROR VOLUME SYSTEM AND METHOD FOR PUMP |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and method for reducing the error in the amount of a fluid dispensed by a pump, by correcting for the compliance of a dispense system. <P>SOLUTION: A method for compensating for errors in dispense volumes of the dispense pump includes: determining a dispense volume amount based on a dispense recipe; determining a value for a fluid property based on the dispense recipe; determining an error volume amount based on the value of the fluid property based on a correlation between the error volume and the fluid property that accounts for compliance in the dispense system; and controlling a dispense motor to move a piston in the dispense pump to a position to account for the dispense volume amount determined from the recipe and the error volume amount to dispense the dispense volume amount of fluid from a nozzle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012180837(A) |
申请公布日期 |
2012.09.20 |
申请号 |
JP20120115369 |
申请日期 |
2012.05.21 |
申请人 |
ENTEGRIS INC |
发明人 |
GONNELLA GEORGE;CEDRONE JAMES |
分类号 |
B67D7/30;F04B13/00;B67D7/08;F04B49/06;F04B51/00 |
主分类号 |
B67D7/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|