发明名称 ERROR VOLUME SYSTEM AND METHOD FOR PUMP
摘要 <P>PROBLEM TO BE SOLVED: To provide a system and method for reducing the error in the amount of a fluid dispensed by a pump, by correcting for the compliance of a dispense system. <P>SOLUTION: A method for compensating for errors in dispense volumes of the dispense pump includes: determining a dispense volume amount based on a dispense recipe; determining a value for a fluid property based on the dispense recipe; determining an error volume amount based on the value of the fluid property based on a correlation between the error volume and the fluid property that accounts for compliance in the dispense system; and controlling a dispense motor to move a piston in the dispense pump to a position to account for the dispense volume amount determined from the recipe and the error volume amount to dispense the dispense volume amount of fluid from a nozzle. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012180837(A) 申请公布日期 2012.09.20
申请号 JP20120115369 申请日期 2012.05.21
申请人 ENTEGRIS INC 发明人 GONNELLA GEORGE;CEDRONE JAMES
分类号 B67D7/30;F04B13/00;B67D7/08;F04B49/06;F04B51/00 主分类号 B67D7/30
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