摘要 |
<p>This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.</p> |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.,;BLACK, JUSTIN, PHELPS;GANAPATHI, SRINIVASAN, KODAGANALLUR;STEPHANOU, PHILIP, JASON;PETERSEN, KURT, EDWARD;ACAR, CENK;SHENOY, RAVINDRA, VAMAN;BUCHAN, NICHOLAS, IAN |
发明人 |
BLACK, JUSTIN, PHELPS;GANAPATHI, SRINIVASAN, KODAGANALLUR;STEPHANOU, PHILIP, JASON;PETERSEN, KURT, EDWARD;ACAR, CENK;SHENOY, RAVINDRA, VAMAN;BUCHAN, NICHOLAS, IAN |