LASER ANNEALING DEVICE AND METHOD

摘要

An optical component of the present invention comprises a first microlens array in which a plurality of convex lens-shaped first microlenses is formed on the surface of a transparent substrate, and a second microlens array in which a plurality of second microlenses and third microlenses, each convex lens-shaped, is formed on the surface and back surface, respectively, of the transparent substrate. The first microlens array and the second microlens array are disposed parallel to each other at an interval apart. The first microlenses and the second and third microlenses are disposed coaxially so as to correspond to each other, and constitute a telecentric optical system. The brightness of laser light on an irradiated surface can thereby be prevented from fluctuating.