Method for depositing layer stack i.e. film, of copper indium gallium selenide solar cell on glass substrate utilized in e.g. vacuum coating system, involves heat-treating and cooling absorber layer for stabilization of layer composition

摘要

The method involves a separating a copper indium gallium selenide (CIGS) absorber layer (3) and an electrically conductive and transparent metal oxide film as a front contact layer (5) on an electrically conductive back contact (2) from a substrate (1). The absorber layer is heat-treated under nitrogenous protective gas atmosphere and presence of selenium and/or sulfur and cooled for stabilization of an adjusted layer composition according to deposition of a layer stack to activate the layer composition by an impulse energy input through electromagnetic radiation or particle bombardment.