| 发明名称 |
MIST SUPPLY DEVICE FOR FILTER INSPECTION |
| 摘要 |
<p>Provided is a mist supply device for filter inspection that can further increase the detection precision of filter defects while using liquid particles. The mist supply device (420) for filter inspection is provided with: a generation unit (20) that generates a gas flow containing a liquid particle group (P); and an elimination unit (52) that eliminates liquid particles (PL) having a relatively large particle size within the liquid particle group (P).</p> |
| 申请公布号 |
WO2012124772(A1) |
申请公布日期 |
2012.09.20 |
| 申请号 |
WO2012JP56742 |
申请日期 |
2012.03.15 |
| 申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED;TOKUOKA YUKIHITO |
发明人 |
TOKUOKA YUKIHITO |
| 分类号 |
G01N15/08;B01D46/42 |
主分类号 |
G01N15/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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