| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a silicon nitride-based ceramic, which suppresses spurt of metal Si in the process of nitriding metal Si. <P>SOLUTION: The method for producing a silicon nitride-based ceramic includes: in a method for producing a silicon nitride-based ceramic by nitriding metal Si, a pore forming step in which a green compact of a mixture comprising metal Si, a sintering aid and a pore-forming agent which forms pores on heating is heated to form pores between metal Si particles in the green compact; a nitriding step in which a porous compact, obtained in the pore-forming step and comprising metal Si with formed pores and the sintering aid, is fired in a nitrogen atmosphere to obtain a reaction sintered compact; and a densification step in which the reaction sintered compact is fired at a temperature exceeding the nitriding temperature at which the reaction sintered compact is obtained in the nitriding step, whereby the reaction sintered compact is densified to obtain a finished sintered compact. <P>COPYRIGHT: (C)2012,JPO&INPIT |
